Page 290 - Semiconductor For Micro- and Nanotechnology An Introduction For Engineers
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Inhomogeneities
                                                2
                                                          2
                                               ∂ u
                                                         ∂ u
                                                            3
                                                  3
                                              ρ---------- =  C ---------- +
                                                       11
                                                 2
                                                           2
                                               ∂t        ∂x 3
                                                                                (7.112c)
                                                      2
                                                                        2
                                              2
                                                                  2
                                             ∂ u    ∂ u        ∂ u  ∂ u 
                                                                    3
                                                1
                                                        2
                                                                          3
                                 ( C 12  +  C ) ----------------- +  ----------------- +  C  ---------- +  ----------
                                         44 
                                                              44
                                                                         2
                                            ∂x ∂x 1  ∂x ∂x 2    ∂x 2 1  ∂x 
                                                      3
                                              3
                                                                         2
                             The surface of a material can be used to serve as a mechanical wave
                             guide, and work in much the same way as optical wave guides do. Four
                             geometrical configurations, shown in Figure 7.14, characterize the very
                      a)                                b)
                                        x                                  x
                           y                                   y
                                   z                                  z
                     c)
                                                       d)
                                          x                    y           x
                             y
                                     z                                z




                Figure 7.14.  Four basic planar surface acoustic waveguide configurations and their
                wave types. a) Thin mechanical plate: Lamb waves. b) Thin film on top of an elastic half-
                space: Love waves. c) Mechanical homogeneous beam: Flexural waves. d) Homogeneous
                elastic half space: Raleigh waves.








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