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Observed Lattice Property Data
Gallium Arsenide GaAs Ga: 69.72 As: 74.9216 Zinc-blende Cubic symmetry 5320 Pure: : 118.1 C 11 : 53.2 C 12 : 59.4 C 44
Process Si 3 N 4 Si: 28.0855 N: 14.0067 Amorphous 3100 320 97 – Y: - 311 B:249
Table 2.1. Lattice properties of the most important microsystem base materials a .
-Quartz Si: 28.0855 O: 15.994 Trigonal symmetry 87
α 2650 Y:
Thermal Oxide SiO 2 28.0855 Si: O: 15.994 Amorphous < 2200 75 72 – Y:
. 174
LPCVD Poly-Si 28.0855 Si: Poly- crystalline 2330 Y: 130 – S: 69
Crystalline Silicon Si 28.0855 Si: Carbon-like, Cubic symmetry 2330 Pure: : 166 C 11 : 63.9 C 12 : 79.6 C 44 p-Type: : 80.5 C 11 : 115 C 12 : 52.8 C 44 n-Type: : 97.1 C 11 : 54.8 C 12 : 172 C 44
) m 3 kg ⁄
Property Atomic Weight Crystal class/ Symmetry Density ( Elastic moduli ) (Gpa Y: Young modulus B: Bi-axial modulus S: Shear modulus : Tensor C i coefficients.
Semiconductors for Micro and Nanosystem Technology 31
