Page 392 - Sensors and Control Systems in Manufacturing

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Cha p te r
Se v e n

1.0030
1.0025
Gain 1.0020
1.0015
1.0010
1.0005
1.0000
0.5 1.0 1.5 2.0
Tilt (mrad)
(a)

0.10
0.08
Nonlinearity (%) 0.06

0.04

0.02
0.00
0.0 0.5 1.0 1.5 2.0
Tilt (mrad)
(b)

FIGURE 7.23 (a) Relative sensor gain versus tilt. (b) Nonlinearity versus tilt.

5
4
3
2
tilt Θy/μrad 1

0
–1
–2
–3
–4
–5
0 1 2 3 4 5 6 7 8 9 10
Control input/V
Forward Backward

FIGURE 7.24 Nano-positioning systems with a micro-radian-range.