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FIGURE 19.121 Schematic diagram of the fabrication process for a surface micromachined accelerometer illus-
trated in the previous figure.
FIGURE 19.122 Schematic diagram of an array tactile sensor: (a) perspective view, (b) cross-sectional view.
Flow Sensors
Sensors for monitoring the flow rate of fluid (air or liquid) and for measuring the drag force exerted on
an object moving in a fluid have important applications in robotics applications. Existing flow sensors
are based on a number of principles, notably thermal and momentum transfer principles.
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