Page 529 - The Mechatronics Handbook

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FIGURE 19.127 SEM micrographs of cantilever beams (a) while in plane, and (b) after PDMA assembly.
Future Development Trends

Miniaturization and integration of circuits has resulted in revolution in the society so far. It drastically
reduces the costs and increased the performance of circuits. Without the integrated circuits technology,
the information age would not have dawned on the human society.
It is conjectured that integrated microsensors are likely to produce as broad and deep an impact on
the society as the integrated circuits. Sensors can be used for robotics sensing, smart buildings, smart

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