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198  A COmPrehenSIVe GUIDe TO SOlAr enerGy SySTemS



               thermally grown SiO 2  layer, in which some windows are opened. local boron diffusion
                                             +
             in these windows creates a local P  back surface field. The Perl structure is shown in
             Fig. 9.17B.
                Both monocrystalline and multicrystalline boron-doped silicon contain relatively
             high concentrations of oxygen. After illumination or carrier injection, B–O complexes
             create recombination centers that result in severe carrier lifetime degradation, and con-
             sequently, in a decrease in efficiency. The oxygen content limits the maximum efficiency
             that is possible using P-type boron-doped silicon. The monocrystalline P-type silicon
             prepared by the float zone method does not contain oxygen, and this type of solar cell
             has the record efficiency of 24%. This material and fabrication technology (Perl [21]
             prepared using microelectronic technology) is too expensive to be used in mass indus-
             trial production.


             9.4.2.2  PERT, TOPCon, and Bifacial Cells
             Phosphorous-doped n-type silicon wafers retain lifetimes on the order of milliseconds
             under the same stresses [22] and therefore can be used as a starting material for high-
             efficient solar cells. The Pn junction is formed by boron diffusion [23]. A disadvantage of
             this technology is that it needs a higher diffusion temperature than the phosphorous dif-
             fusion and for P-type surface passivation there must be a layer of thermally grown SiO 2 , on
             which a thin layer of Sin x :h or TiO 2  is deposited to form an effective antireflection coating.
             This technology needs a process temperature of over 1000°C; this is also not compatible
             with multicrystalline material because this material does not tolerate temperatures above
             900°C [15]. Therefore, at present only monocrystalline starting n-type material is used in
             this process for mass production. The multicrystalline n-type material cells technology
             is still an object of research and development, even though recent research brings very
             promising results [24].
                n-type PerT (passivated emitter rear totally diffused) cells are from the view of the
             construction similar to PerC cells fabricated from P-type silicon. The structure is shown in
             Fig. 9.18. After surface texturing and boron diffusion, the rear of the wafer is polished and
                                                           +
             phosphorous is diffused into the rear to create a n n structure on the back surface. The
             front surface doped with boron needs a thin layer of SiO 2  or Al 2 O 3  as effective passivation
             that can be overlapped with a layer of Sin x  to create the antireflection coat. The phospho-
             rous diffused layer on the rear side requires a layer of Sin x  for passivation. After surface
             passivation, a laser is used for the local opening of the rear dielectric layers. After the laser
             ablation, aluminum is evaporated (or sputtered) to create the rear contact. These PerT
             cells from n-type monocrystalline Si can reach efficiencies of over 22% [25].
                The next high-efficient PV cell structure on n-type starting material is the so-called
             TOPCon (tunnel oxide passivated contact) structure [26], as shown in Fig. 9.19. The front
             side of the cell is fabricated in the same way as the PerT cells. On the rear side of the  n-type
             bulk materiál, a SiO x  passivation layer of thickness one or two nanometers is  deposited
                                                                            +
             which allows the charge carriers to “tunnel” through. Then, a thin n  layer is deposited
             over the entire layer of the ultra-thin tunnel oxide and covered with a metallic layer to
             create the rear contact. The TOPCon structure has been shown to have an efficiency of
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