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136  Measurement of pressure

            diaphragm chamber to isolate the force-summing   The  use  of  digital  pressure  transducers  has
            diaphragm from the mounting and other environ-   grown dramatically with the trend towards digital
            mental stresses.                         data-acquisition  and control systems. Inherently
              The transducer is modular  in construction  to   digital sensors such as frequency output  devices
            allow the use of  alternative diaphragm configur-   have been  combined with microprocessor based
            ations and materials.  For most  applications  the   systems  to  provide  unparalleled  accuracy  and
            diaphragm is stainless steel and  the thickness is   performance, even under extreme environmental
            selected according  to the  required  measurement   conditions. The design and performance require-
            range.  For  some  applications,  enhanced  corro-   ments of these advanced transducers include:
            sion resistance is required, in which case Inconel
            625  or  other  similar  alloys may  be  used  as  the   Digital-type output
            diaphragm material, but to retain the same mar-   Accuracy comparable to primary standards
            gin  of  safety  a  thicker  member  is  usually   Highly reliable and simple design
            required  and this in turn reduces the sensitivity.   Insensitivity to environmental factors
              The sensor is a sputtered thin-film strain gauge   Minimum  size,  weight,  and  power  consump-
            in which the strain-gauge pattern  is bonded  into   tion
            the  structure of the sensor assembly on a mole-   Ease and utility of readout.
            cular  basis  and  the  sensor  assembly  itself  is   Over the last three decades, Paroscientific Inc.
            welded into the remaining structure of the trans-   has developed and produced digital quartz crystal
            ducer.  The  stainless-steel header  which  contains   pressure sensors featuring resolution better than
            the  electrical  feed-through  to  the  temperature-   one part per million and accuracy better than 0.01
            compensation  compartment  is  also  welded  into   percent.  This  remarkable  performance  is
            the structure of the transducer.          achieved  through  the  use  of  a  precision  quartz
              This welding, in conjunction  with the ceramic   crystal resonator  whose  frequency of oscillation
            firing  technique  used  for  the  electrical  feed-   varies with pressure-induced stress. Quartz crys-
            through  connections,  provides  secondary  con-   tals were chosen for the sensing elements because
            tainment security of  50 MPa for absolute gauges   of their  remarkable repeatability, low hysteresis,
            and those with a sealed reference chamber.   and  excellent  stability.  The  resonant  frequency
              Sensors of this  type are available with ranges   outputs are maintained and detected with oscilla-
            from 0 to lOOkPa up to 0 to 60MPa with max-   tor  electronics similar to those used in precision
            imum non-linearity and hysteresis of 0.25 to 0.15   clocks and counters.
            percent  respectively  and  a  repeatability  of  0.05   Several single or dual beam load-sensitive reson-
            percent of span.                          ators have been developed. The single-beam reso-
              The maximum temperature effect is 0.15 percent   nator is shown diagrammatically in Figure 9.29. It
            of span per Kelvin.                       depends for its operation on a fixed beam oscil-
                                                      lating in  its first flexural mode  with an integral
            9.2.4.3  High accuracy digital quartz crystal   isolation system that effectively decouples it from
            pressure sensors                          the structures to which it is attached. The entire
                                                      sensor is fabricated from a single piece of  quartz
            Performance and utilization factors may be used to   to minimize energy loss to the mounting surfaces.
            differentiate between digital and analog instrumen-   The  beam  is  driven  piezoelectrically  to  achieve
            tation  requirements.  Performance  considerations   and  maintain  beam  oscillations.  Figure  9.29
            include resolution, accuracy, and  susceptibility to   shows the placement of electrodes on the beam
            environmental errors.  Utilization  factors  include   and  Figure  9.30  illustrates  the  response  to  the
            ease  of  measurement,  signal transmission,  equip-   imposed electric field from the oscillator electron-
            ment interfaces, and physical characteristics.   ics.  The  Double-Ended  Tuning  Fork  (DETF)
              Some advantages of digital sensors relate to the
            precision with which measurements can be made
            in the time domain. Frequencies can be routinely
            generated and measured to a part in ten billion,
            whereas analog voltages and resistances are com-
            monly measured to a part per million. Thus, digital-   Crystal   Electrode
            type transducers have a huge inherent advantage                       Charge
            in  resolution  and  accuracy  compared  to  analog
            sensors.
              Frequency signals are less susceptible to inter-
            ference. easier  to  transmit  over  long  distances,
            and easily interfaced to counter-timers, telemetry   Figure 9.29  Resonant piezoelectric force sensor
            and digital computer systems.             Courtesy, Paroscientific Inc.
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