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Interferometric sensing approach 177
            for the intense  recent  interest  in the  low coher-   Perot  cavity sensor element was composed  of  a
            ence method.  It should also be pointed  out that   thin  Sic film etalon  (Boheim  1986). The  refer-
            unlike  the  current-modulated  pseudo-heterodyne   ence cavity is temperature controlled and its out-
            method,  the low coherence method  can operate,   put  interference  signal  is  used  in  a  feedback
            under suitable conditions, with multimode as well   control  to  stabilize the  mean  imbalance  of  the
            as  single mode  optical  fibers.  The  requirement   Michelson processing interferometer.  The piezo-
            here  is that  the light  returned  from  the optical   electric modulator PZTl drives one mirror of the
            sensing  interferometer  satisfies  the  common   Michelson  in  a  serrodyne (sawtooth) waveform
            mode condition  such  that both  reflected beams   in  order to scan a complete  output  interference
            from  the  two  interferometer  mirrors  follow   sinusoidal  temporal  fringe  in  the  outputs from
            exactly  the  same  modal  path  when  transmitted   both  the  cavity  elements.  By  utilizing the  tem-
            back through the multi-mode  optical fiber or, if   perature  stabilized  reference  sensor  output and
            not,  then  sufficient mode  mixing  occurs in  the   by  interacting with  PZT2,  the feedback  control
            fiber length to evenly distribute the back-reflected   circuit compensates for both thermal and vibra-
            light into all the fiber modes (Chen et al. 1992a).   tion instabilities in the processing interferometer.
              One  of  the  first  successful  practical  demon-   The sensor element in this work was separated
            strations of the capability of the white-light tech-   from the fiber sensor lead by an air path since the
            nique  was  reported  by  Boheim  (1985).  In  this   elevated  temperature  of  1000 "C used  was  well
            system a  multimode  optical  fiber link  was used   above the  survival temperature  of  the  fiber net-
            with a Michelson reference interferometer  and a   work. The collimated output from the fiber sen-
            low  finesse Fabry-Perot  sensor  cavity.  Further   sor  lead  was  reflected  back  from  the  remotely
            analysis  was  then  given  in  subsequent  publica-   placed  Sic sensor  etalon.  The  SIC  etalon  was
            tions. and the system was later applied to a high   18 pm thick and deposited on a silicon substrate.
            temperature  sensor  (Boheim  and  Fritsch  1987)   The reflected radiation was relaunched back into
            and  a  pressure  sensing  device  (Boheim  etal.   the optical fiber and returned  through  a  second
            1987).  A  similar  approach  using  single  mode   directional  coupler  to  an  output photodetector.
            fiber  techniques  has  been  used  by  Meggitt   Phase movement in the output fringe pattern of
            (1991)  in  a  prototype  system  in  physiological   the  sensor  cavity was  a  direct  measure  of  tem-
            applicatioins for temperature  and pressure meas-   perature of the sensor etalon. Measurements were
            urement.  The  basic  configuration  used  in  the   made over the temperature range 20-1000  "C and
            high-temperature  sensor  work  (Boheim  1986) is   compared with a thermocouple  device cemented
            illustrated in Figure 12.7. Here, ai? 840nm wave-   to the Sic sensor etalon. With a 1 s measurement
            length LED source is collimated and then passed   time constant, a long term temperature resolution
            through  a  Michelson  reference  interferometer   of 0.5 "C was reported.
            before being coupled  into an optical fiber direc-   Meggitt  (1991) has  reported  the  development
            tional  coupler,  the  output  of  which  feeds  two   of a temperature sensor system- using single mode
            interferometer  cavities:  one  a  reference  Fabry   fiber techniques  and utilizing a multimode laser
            Perot  cavity  and  the  other  the  operating  high   source,  a  capacitive  feedback  stabilized  low
            temperature  Fabry-Perot  sensor.  The  Fabry   finesse  Fabry-Perot  processing  interferometer

                                           h
               h                                               Reference
                                  Feedback
                                 Stabiliition




                                                           Temperature = T,,t

                                                         Fiber    Substrate







            Figure 12.7  Low-coherence high temperature optical fiber sensor system (Boheim 1986) using a Sic thin film etalon
            sensing element
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