Page 339 - Introduction to Information Optics

324 6. Interconnection with Optics

1.2 i i i

1

08
Thlrka* !
00

0-4

02 Qa O
linear flr, • • •
0

Thnff (mla)
Fig. 6.22. The etching rate of Ultradel 9120D polymer by oxygen in a RIE process.

increased. Following the same fabrication processes as above, tilted gratings
have been successfully made on other high-index polymers such as 1608D
polyimide. Figure 6.24 is a SEM picture of the profile of the tilted grating on
1608D polyimide.

6.3.1.2.2. Input and Output Coupling Results

The schematic of coupling a surface-normal input light into a waveguide
using the device fabricated is shown in Fig. 6.25(a), together with an experi-

Fig. 6.23. SEM picture of the 4-micron period tilted grating.