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6.3. Thin-Film Waveguide Couplers














                  Substrate lOiim
              Fig. 6.28. THE SEM micrograph of the cross section of the 45° microcoupler.



         6.3.2.2. Output Profile of Micromirror Coupler
       The output profiles from one of the 45° microcouplers are shown in Fig.
       6.30(a), (b), and (c). These figures correspond to z — 100 fan, z = 1 ram and
       z = 5 mm, respectively, where z is the distance from upper surface of the
       coupler to the point of observation. The output coupling efficiency of this 45°
       microcoupler is nearly 100%. The half width at half maximum (HWHM) of
       the output profile at the microcoupler is about 60 /mi, which is comparable
       with the active region of a silicon-based photodetector having a bandwidth of
       6 GHz [22]. If the photodetectors are mounted close to the microcouplers,
       most of the light can reach the photodetectors and thus the coupler-to-detector
       coupling efficiency can be very high.
         The output profile from the 45° microcoupler can be determined using
       diffraction theory. According to Fresnel approximation [23,24], the near field
       distribution U(x, y) is given by:


                   exjp(.//cz)              A
                     JZA                    2z














                  Fig. 6.29. A planar polyimide waveguide with waveguide mirror.
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