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334                     6. Interconnection with Optics








                                              2.648GHZ











                         1.00E+009  2.00E+009  3.00E+009  4.00E-t-009  5.00E+009
                                   Frequency (Hz)

       Fig. 6.34. The frequency response of integrated MSM photodetector and polyimide waveguide
       with 45 TIR mirror. The 3dB bandwidth is 2.648 GHz.



       range from 9kHz to 26 GHz. The light source for frequency response
       measurement is a Ti:sapphire mode-locked laser operating at 800 nm with a
       pulse width of about 150fs and a repetition rate of 76 MHz. The laser power
       is attenuated from its original 200 mW to 10 mW before it is coupled into the
       waveguide array. An ampere meter is serially connected between the contact
       probe and the biasing DC power supply. A 40 GHz ground-signal-ground
       (GSG) microwave probe is used for the device contact. The biasing voltage is
       provided by a DC power supply (Model E3611A, HP, Inc.) through a
        100k -18 GHz biasing tee (Model 5550B, Picosecond, Inc.). The pulsed laser
       light is butt-coupled into the input end of the waveguide array through a bare,
       cleaved-end, single mode fiber. At the output end the guided light is reflected
       from the 45° microcoupler onto the active area of the photodetector. The
       optical input pulses and the complete measurement system are calibrated using
       a 30 GHz bandwidth photodetector module (Model D-15, Newport, Inc.). The
       3dB bandwidth of a single MSM detector is 2.648 GHz, as shown in Fig. 6.34.


       6.5. INTEGRATION OF VERTICAL CAVITY SURFACE-EMITTING
           LASERS (VCSELs)

          We chose 850 nm to be the operating wavelength because of the availability
       of high-performance vertical cavity surface-emitting lasers (VCSELs) [27].
       These laser devices, compared to conventional edge-emitting lasers, offer a very
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