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6.4. Integration of Thin-Film Photodetectors


















       Fig. 6.31. A SEM picture of a mirror coupler integrated with a polymer channel waveguide and
       input light coupling in a planar polyimide waveguide with a waveguide mirror.




       nearly 100% for a waveguide mirror coupler due to total internal reflection.
       Considering the implementation of thin-film vertical cavity surface-emitting
       lasers and Si-photodetectors onto a board involving 3-D interconnection
       layers, we need to use a very short working distance (~ few /an to tens of /an)
       in the surface-normal direction. This restriction makes the 45° waveguide
       mirrors the best approach for this purpose.



       6.4. INTEGRATION OF THIN-FILM PHOTODETECTORS

         In the context of board-level optical interconnect applications, we determine
       the thin-film MSM photodetector to be the most appropriate because it can
       provide a very high demodulation speed, due to the fast transit time of
       electron hole pairs, and it can be directly integrated onto target systems.
       Moreover, compared to the vertical structure of a PIN diode, the structure of
       the MSM photodetector makes it much easier to integrate it with microwave
       planar waveguide circuits. Recent research on distributed traveling-wave MSM
       photodetectors reveals the possibility of making optoelectronic hybrid inte-
       grated circuits, where optical channel waveguide and microwave coplanar
       waveguide (CPW) coexist on the same substrate [25]. This is an important
       feature for the architectural design of optical interconnects, because it can
       provide better integration level and simplify the configuration.
         Further, MSM structure can function as a switching device by biasing it
       appropriately [26]. This specific attribute can be extremely helpful to recon-
       figure the interconnect topology. The switching capability is a consequence of
       the energy-band structure of the MSM junction, in which a potential well
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