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4-2                                                              MEMS: Design and Fabrication
























































































             FIGURE 4.1 (a) Basic LIGA process steps X-ray deep-etch lithography and first electroforming. (b) Plastic molding
             and second electroforming/slip casting. (Reprinted with permission from Lehr, H., and Schmidt, M. [1995] “The LIGA
             Technique,” commercial brochure, IMM GmbH, Mainz-Hechtsheim.)





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