Page 237 - Mechanical design of microresonators _ modeling and applications

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Resonant Micromechanical Systems

236 Chapter Five

8
0.8
I- II
rω b
2
0.1
0.
1
c t

cl
0.1
1 1
Figure 5.8 Bending resonant frequency ratio: model I predictions against model III
predictions (paddle microcantilever of constant width).

1.4
0.8
I- II
rω t 1.2

1 1
c t

c l
5 5 0.1
Figure 5.9 Torsion resonant frequency ratio: model I predictions against model II
predictions (paddle microcantilever of constant width).

Fig. 5.10 indicates, that for relatively short and thin root segments, the res-
onant frequency predicted by model I is smaller than that of model III,
whereas when c l and c t do increase, the relationship between the two model
predictions reverses.

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