Page 150 - Mechanics of Microelectromechanical Systems
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3. Microsuspensions                                               137
         Solution:
             The procedure followed previously for the non-inclined beam-spring also
         applies here, but in addition to calculating the unknown bending moment
         the reaction force   as  sketched in Fig.  3.6 (b), needs to be calculated in
         the beginning.
             Because both the rotation  and  the  displacement  are  zero, these two
         conditions will provide the equations to solve for   and   They can be
         expressed in terms  of   and  therefore  the displacement   can now be
         determined such that the sought stiffness is expressed as:





















          Figure 3.6 Inclined beam spring: (a) accelerometer configuration; (b) Geometry, loads and
                                         reactions








          where:







          and:









          By taking       in  Eq.  (3.15), (3.16) and  (3.17), Eqs.  (3.6) and  (3.7) are
          retrieved, as  expected. Equation (3.15) can  also  be expressed in terms  of
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