Page 153 - Mechanics of Microelectromechanical Systems
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140 Chapter 3
The terms of the compliance matrix are:
The superscripts (1) and (2) refer to the first segment 1-2 and to the second
one 2-3, respectively. The compliances of the right-hand side of Eqs. (3.20)
through (3.25) are calculated for each of the two members with respect to
their local frames. In doing so, members of different geometries (defined as
free-fixed microhinges) can be utilized in a bent beam design. A stiffness
matrix can be defined by inverting the compliance matrix of Eq. (3.19):
In the case the two compliant segments of the bent beam are identical, the
particularly-important in-plane stiffnesses are:
