Page 308 - Mechanics of Microelectromechanical Systems

5. Static response of MEMS 295

As Eq. (5.85) indicates, the displacement amplification is not a linear
function of the input displacement Figure 5.30 is a plot of the
amplification in terms of the length of the mid link and its original inclination
angle (for an input displacement whereas Fig. 5.31 shows the
variation of the same amount as a function of the input displacement (when
and

Figure 5.30 Displacement amplification as a function of the main link’s length and
inclination angle

As expected, the amplification increases with the length increasing and
with the inclination angle decreasing, as shown in Fig. 5.30. Also, an
interesting feature of this device consists in the fact that larger input
displacements produce smaller amplifications, as indicated by the plot of
Fig. 5.31.

Figure 5.31 Displacement amplification as a function of the input magnitude