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5. Static response of MEMS 293
where is the bloc force – Eq. (4.5) and is the free displacement – Eq.
(4.6). By substituting Eqs. (5.81) and (5.80) into Eq. (5.68), an algebraic
equation is formed, which can be solved for as:

By combining Eq. (5.82) with the first Eq. (5.67), the horizontal
displacement at point 1 becomes:

5.2 Sagittal Displacement-Amplification Microdevices

Another type of amplification microdevice is the sagittal design, which
was presented in Chapter 3 as a suspension component. Figures 5.26, 5.27
and 5.28 are sketches of three sagittal amplifiers.

Figure 5.26 Sagittal displacement-amplifying microdevice with four straight flexure hinges

Figure 5.27 Sagittal displacement-amplifying microdevice with four curved flexure hinges
The operation principle of all these devices is rather simple: application of an
input force F will generate deformation of the flexure-based mechanisms,
and the input displacement corresponding to the force F will be amplified at