Page 218 - Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim
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198 MICROSTEREOLITHOGRAPHY FOR MEMS
(a) (b)
(e)
(0
Figure 733 Complex 3-D microstructures fabricated using dynamic mask projection MSL:
(a) microcup made up of 80 layers of 5 um thickness; (b) microturbine made of 110 layers of
4.5 um thickness; (c) microcars made of 673 layers of 5 um thickness; (d) microsprings made of
1000 layers of 5 um thickness; (e) close-up of spring; (f) lateral hole in the structure made of
imbricated spring; (g) a side mirror of a car made of about 20 layers; (h) wheel of a car; (i) detail
of car microprints on the roof of the car; (j) double-end connector made of 700 layers of 5 um
thickness; (k) two channels corresponding to each tube connector with external diameter of 200 um.
From Beluze et al. (1998, 1999)
