Page 219 - Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim
P. 219
POLYMERIC MEMS ARCHITECTURE 199
Figure 7.33 (Continued)
Ceramic MSL differs from polymeric MSL in the following aspects. First, the resin
system for ceramic MSL is composed not only of the monomers and photoinitiators that
are used in polymer MSL but also of ceramic powders, dispersants, and diluents (Zhang
et al. 1999; Varadan et al. 1996). Dispersants and diluents are used to obtain a homoge-
neous ceramic suspension with a relatively low viscosity. Upon UV polymerisation, the
ceramic particles are bonded together by the polymer and the ceramic body is formed.
