Page 221 - Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim
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Design (CAD)
Materials preparation:
Ball milling UV
monomer system and
ceramic powders
Microstereolithography
(green body)
Binder burnout & sintering
(densed ceramics)
Figure 7.35 Ceramic MSL and postprocessing
Figure 7.36 Ceramic microparts made by MSL. From Jiang et al. (1999)
