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EPITAXY
15.14 WAFER PROCESSING
Substrate
cleaning
Particles
inspection
Maintenance Process tuning
Epi reactor
Reactor monitoring; Process control:
Metals, particles and Sampling Sampling Thickness and
intrinsic resistivity resistivity monitoring
Particles
inspection
Slip
Nanotopography
Flatness
Post-epi cleaning
Visual Particles
inspection inspection Shipping
FIGURE 15.13 Process flow in advanced CMOS Si epitaxy.
B
B
B
A A
B
A B B B A
B A A A
FIGURE 15.14 Example of SPC charts showing poor performance from load-lock B.
A
Lot change
B B
B B A
B A A
A
B A A A B
FIGURE 15.15 Example of an SPC chart showing the effect of lot change.
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