Page 231 - Semiconductor Manufacturing Handbook

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EPITAXY

15.16 WAFER PROCESSING

FIGURE 15.16 FOUP cassette and opener. (Courtesy of Brooks
Automation.)

15.6 CONCLUSIONS

This chapter gives a bird-eye view of the fundamentals of epitaxy, the most common epitaxy process-
es and equipment and a condensed version of manufacturing environment and process control. These
topics are vast and require the combined knowledge of various disciplines from material science to
facility management to quality control and management. A team of experts in all these areas makes
a successful epitaxy foundry.

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