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96 Cha pte r T h ree
A new generation of chip stacking began to evolve in the 1990s. It is stacking of bare
chips leading to higher stacking density. The electrical performance was also greatly
enhanced by employing short interconnections that include wire bonding, tape
automated bonding (TAB), or newly introduced side termination methods. Even though
the wire bonding technology had been used since the 1970s, it was only in the 1990s
when the technology began to be applied to SIP on a commercial scale. A few package
stackings were also demonstrated by employing the same configuration as chip stacking
with side termination interconnects.
The wire bonded chip stacking interconnection led to the introduction of flip chip
interconnection for SIP around 2000 when flip chip became a high-volume assembly
technology. Application of embedded IC technology to chip stacking enabled chip-scale
package (CSP) stacking. At about this time, some of the limitations of chip stacking
technologies were also realized. This led to alternatives to chip stacking, which include
package-on-package (PoP), package-in-package (PiP) and folded-stacked chip scale
package (FSCSP).
The following two sections describe widely used non-TSV chip and package
stacking technologies currently in use.
3.3.2 Chip Stacking
Over the past few years, chip stacking has emerged as an effective solution for integrating
similar or dissimilar chips. Integrating chips vertically in a single package multiplies
the amount of silicon that can be crammed in a given package footprint, conserving
board real estate. At the same time, it enables shorter routing of interconnects from chip
to chip, which speeds signaling between them. Initial applications of chip stacking were
two-chip memory combinations such as flash and SRAM. Memory stacking remains
the most popular even today but includes new variations like flash plus flash. More
recently, it has been further extended beyond memories to include the combination of
logic and analog ICs. In this section, various chip stacking architectures are introduced
with the basic underlying technologies for their chip stacking.
Wafer Thinning, Handling, and Dicing
Advances in chip stacking technologies are enabling the stacking of more dies in a given
height. To accomplish this basic goal, a variety of underlying technologies have been
developed, which include wafer thinning, thin wafer handling, and dicing as described
here.
Wafer Thinning Wafer thinning is an essential process step before chip or package
stacking of SIP modules because it reduces stack height and enables the addition of
more chips without increasing the overall stack height. Stacking multiple chips helps to
minimize the xy package dimensions, while thinning minimizes the total height of the
z dimension. Figure 3.17 shows the evolution of wafer production in diameter, thickness,
and wafer-thinned dimensions during the last 50 years [11]. Larger wafers require
thicker silicon to withstand wafer manufacturing, while new packaging trends such as
SIP continue to require thinner final chips. The industry has decreased chip thickness
by about 5 percent a year. This trend is expected to continue, leading to wafers as thin
as 20 μm by 2015. Figure 3.18 shows the number of chips to be expected in SIP and the
Si chip thickness requirement for the stacking [12]. Future SIP definitely requires
stacking a larger number of thinner chips.