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172 Introduction to Microfabrication

4. If a 20 nm thick titanium layer is used as a Kiviranta, M. et al: Dc and un SQUIDs for read-out of ac-
polish stop underneath 500 nm thick tungsten, biased transition-edge sensors, IEEE Trans. Appl. Super-
and film thickness non-uniformities are ±5% and cond., 13 (2003), 614.
CMP non-uniformity is ±10%, what must polish Lin, S.Y. et al: A three-dimensional photonic crystal operating
selectivity be? at infrared wavelengths, Nature, 394 (1998), 251.
5. Work out a step-by-step fabrication process for the Steigerwald, J.M., S.P. Murarka & R.J. Gutman: Chemical
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Wiley & Sons, 1997.
Stine, B.E. et al: Rapid characterization and modeling of
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