Page 189 - Mechatronic Systems Modelling and Simulation with HDLs

178 8 MICROMECHATRONICS

20n
x deflection [m] 10n

0.0

y deflection [m] 500n
0.0

1µ
200n 400n 600n 800n 1µ
t [s]
Figure 8.9 Response of the mechanical structure to a sudden change of pressure

Saber simulation
2.6 Diameter: 120 µm
2.4

2.2

2.0
C [pF] 1.8

1.6

1.4
1.2

1.0
0 1 2 3 4
Pressure [bar]

Figure 8.10 Capacitance against pressure for an element diameter of 120 µm

The x and y displacements of various points on the radius are considered, see
for comparison Figure 8.4. The horizontal (x) displacements are positive and in
the direction of the plate. They are smaller by a factor of 50 than the vertical (y)
displacements, which have negative values and consequently describe a lowering
of the plate. In a vertical deflection of −800 nm, the plate meets the isolator,