Page 193 - Mechatronic Systems Modelling and Simulation with HDLs

182 8 MICROMECHATRONICS

4.5
Diameter: 73 µm
Diameter: 72 µm
4.0 Diameter: 71 µm
Diameter: 70 µm
3.5 Diameter: 69 µm
Diameter: 68 µm
3.0 Diameter: 67 µm
C [pF]

2.5

2.0

1.5

1.0
0 5 10 15 20 25 30
Pressure [bar]

Figure 8.15 Parametric Saber simulations for the variation of the diameter of the pressure
element. The plate thickness is fixed at 1.7 µm

4.5
Plate thickness: 1.55 µm
Plate thickness: 1.60 µm
4.0 Plate thickness: 1.65 µm
Plate thickness: 1.70 µm
3.5 Plate thickness: 1.75 µm
Plate thickness: 1.80 µm
3.0 Plate thickness: 1.85 µm
C [pF]

2.5

2.0

1.5

1.0
0 5 10 15 20 25 30
Pressure [bar]
Figure 8.16 Parametric Saber simulations for the variation of the plate thickness of the pressure
element. The diameter is fixed at 70 µm

8.3 Demonstrator 6: Micromirror

The second example here is a micromirror, which is arranged in arrays in order to
generate pixel images of all types. Just like the pressure sensor described above,