Page 233 - Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim

COMBINED SILICON AND POLYMERIC STRUCTURES 213

Figure 7.53 Master layout in SU-8 before electroplating. From Bertsch et al. (1998)

Figure 7.54 Schematic showing the positioning of the SU-8 structure relative to the UV light beam

7.8.3 AMANDA Process

AMANDA is a process that combines surface micromachining, micromoulding, and
diaphragm transfer to fabricate microparts from polymers. A flexible diaphragm, made of
either functional or structural materials, is deposited and patterned on a silicon substrate
using a surface-micromachining process. The moulding process is then used to build
the housing for the fabricated diaphragm and the diaphragm is next transferred from the
silicon substrate to the polymeric housing. Hence, the AMANDA process allows low-cost
production of reliable microdevices by batch fabrication.