Page 228 - Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim
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208   MICROSTEREOLITHOGRAPHY FOR MEMS


















  Figure  7.45  Complex  metal-polymer part  of height  15 mm and diameter  10 mm. From  Cabrera
  et al.  (1998)












































 Figure 7.46  (a)  The  concept  of  localised  electrochemical  deposition  and  (b)  apparatus  used  for
 position control
 position control
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