Page 37 - Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim
P. 37

PATTERN  TRANSFER    19



















                     X    /
                      Mask
                    Motorized
                    x-y  stage


                 Vibration-isolated
                      table

             Figure  2.8  Typical arrangement of a mask-making  machine













                                         Liquid drop

                                                Wafer





                                         Motor





                                     Vacuum line


   Figure 2.9  Basic setup for the  spin casting of a photoresist  layer onto a silicon  wafer
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