Page 316 - Book Hosokawa Nanoparticle Technology Handbook
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5.3 SURFACE STRUCTURE                                                        FUNDAMENTALS
                  energy of h , in which h is Planck constant and   is  by diffracting and focusing a non-monochromatic K
                  frequency of the radiation, the photon energy is totally  X-ray radiation emitted from an electron-bombarded
                  absorbed by an electron that is bound in either core  thin metal anode (usually Mg or Al), which gives rise
                  levels or valence levels of an atom in a molecule or  to MgK radiation with a photon energy of 1253.6 eV

                  solid with a binding energy of E , leading to ioniza-  and AlK radiation with a photon energy of 1486.6

                                             b
                  tion and the emission of the bound electron out of the  eV. Photoelectrons, which are emitted from the sam-
                  atom with an energy of h    E through the photo-  ple surface through the photoelectric effect, are col-
                                            b
                  electric effect. Hence, the photo-emitted electron is  lected into the electron energy analyzer. There exist a
                  called a photoelectron.                        variety of designs for the electron analyzer, however,
                    Now let us consider a physical situation to measure  the most preferred and the most commonly employed
                  an energy spectrum of photoelectrons emitted from a  design for the photoelectron spectroscopy is a con-
                  solid-material sample, which is irradiated with a  centric hemispherical analyzer, in which a static elec-
                  monochromatic soft X-ray radiation beam, using an  tric field between two hemispherical surfaces
                  electron energy analyzer that is electrically con-  disperses electrons according to their kinetic energy.
                  nected to the solid–material sample, as schematically  The energy-analyzed electrons are normally detected
                  illustrated in Fig. 5.3.21. Main components of the  with electron-multiplication devices such as a
                  XPS system for the photoelectron measurements  channeltron and a multichannel plate (MCP).  The
                  include a source of monochromatic X-ray radiation  channeltron is employed for measurements of the
                  beam, a sample stage with a set of stage manipulator  electrons at a fixed point of the detector position by
                  and a sample introduction–transfer mechanism, an  converting the flux of electron signals to a multiplied
                  electron energy analyzer with an electron-collection  electron current, while the MCP is employed in the
                  lens and electron optics, an electron detector system,  advanced systems for 2D measurements of the elec-
                  and mu-metal magnetic field shielding, which are all  trons reaching (to) the detector position according to
                  equipped in an ultra-high vacuum (UHV) chamber  the energy-dispersed spectrum versus the angular
                  with UHV pumps. In the commonly employed X-ray  and/or the spatial distribution of the photoelectron
                  sources, monochromatic X-rays are usually produced  collection.
                                                                  The kinetic energy of the photoelectron measured
                                                                 with the energy analyzer is determined as follows.
                                                                 Here it is noted that the Fermi levels at the sample sur-
                                    Electron energy analyser
                                (concentric hemispherical analyser)  face and the electron energy analyzer are kept at a
                                                                 common level since the sample surface and the elec-
                                                                 tron energy analyzer are electrically connected to
                                                                 each other and thus both of the objects are in thermal
                                                                 equilibrium. Therefore, the kinetic energy of the pho-
                                                                 toelectrons measured with the electron analyzer (E )
                                                                                                          k
                                                                 can be determined using an equation:

                                                                                E    h    E            (5.3.6)
                                                                                 k       b
                                                Electron detector
                                                                 where E is the kinetic energy of the photoelectron as
                                                                       k
                                                                 measured with the electron energy analyzer,  E the
                                                                                                        b
                                                                 binding energy of the photoelectron emitted from one
                      Electron                                   orbital within the atom as normalized to the common
                       optics
                                                                 Fermi level, h  is the photon energy of the X-ray radi-
                                           Monochromatic x-rays  ation being used and   is the work function of the
                             Photoelectrons     (Photons)        electron energy analyzer as normalized to the com-
                                                                 mon Fermi level. Thus we can measure the binding
                                                                 energy of the photoelectron that is normalized to the
                                                                 common Fermi level [1]. The energy spectrum of pho-
                                                                 toelectrons measured with an XPS system reflects the
                                Sample                           electronic structures of the atoms, since each element
                                                                 produces a characteristic set of XPS peaks at charac-
                                                                 teristic binding energy values.  Therefore, the ele-
                                                                 ments that are present in the sample surface can be
                                                                 directly identified by the characteristic set of XPS
                                                                 peaks. However, it is important to note that an XPS
                  Figure 5.3.21                                  analysis of a non-conductive insulation material
                  Basic components of XPS system.                requires special care since the XPS measurements of

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