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Geng(SMH)_CH13.qxd 04/04/2005 19:51 Page 13.5
PHYSICAL VAPOR DEPOSITION
10 1
Mo Rh Pt Zr Ni Au Cu Al Ag Ca Li Mg Zn 10 0
Ti Fe Be
10 −1
Nb
10 −2
Ta
10 −3
W
10 −4
10 −5
10 −6
Evaporation rate/g cm −2 s −1
10 −7
10 −8
10 −9
10 −10
10 −11 Evaporation rates of selected metals as functions of temperature [1].
10 −12
Melting point 10 −13
10 −14
10 −15
10 −16
3500 3000 2500 2000 Temperature/K 1500 1000 500 0 FIGURE 13.5
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