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SILICON SUBSTRATES FOR SEMICONDUCTOR MANUFACTURING

3.16 SEMICONDUCTOR FUNDAMENTALS AND BASIC MATERIALS

3.6 CONCLUSIONS

In this brief review on semiconductor substrates, a discussion of silicon substrates and the multitude
of variations, which are being developed, based on silicon was presented. This is a very large sub-
ject and it has not been the intent of this chapter to exhaustively review all aspects of semiconductor
substrates. With silicon and its variants being the preeminent materials for semiconductor manufac-
ture the emphasis has been on this material. It is clear that the desirable properties of silicon, its ready
availability in quantity and the existence of a mature manufacturing base make it the desirable sub-
strate for other, less mature or more expensive substrates. Consequently the indirect use of silicon as
a substrate is perhaps just as significant as the direct use of silicon for semiconductor devices and
circuit manufacture. The opportunities for exploiting this material further are almost limitless.

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