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MEMS Fabrication 3-205

Madou, M.J. (1994) “Compatibility and Incompatibility of Chemical Sensors and Analytical Equipment
with Micromachining,” in Technical Digest: 1994 Solid State Sensor and Actuator Workshop, Hilton
Head Island, SC, pp. 164–71.
Madou, M.J. (2002) Fundamentals of Microfabrication, 2nd ed., CRC Press, Boca Raton.
Madou, M.J., Frese, K.W., and Morrison, S.R. (1980) “Photoelectrochemical Corrosion of
Semiconductors for Solar Cells,” SPIE 248, pp. 88–95.
Madou, M.J., Loo, B.H., Frese, K.W., and Morrison, S.R. (1981) “Bulk and Surface Characterization of the
Silicon Electrode,” Surf. Sci. 108, pp. 135–52.
Madou, M.J., and Morrison, S.R. (1989) Chemical Sensing with Solid State Devices, Academic Press,
New York.
Madou, M.J., and Otagawa, T. (1989) “Microelectrochemical Sensor and Sensor Array,” U.S. Patent
4,874,500.
Madou, M.J., and Tierney, M. (1994) “Micro-Electrochemical Valves and Methods,”U.S. Patent 5,368,704.
Maluf, N. (2000) An Introduction to Microelectromechanical Systems Engineering, Artech House, Boston.
Man, P.F., Gogoi, B.P., and Mastrangelo, C.H. (1996) “Elimination of Post-Release Adhesion in
Microstructures Using Thin Conformal Fluorocarbon Films,” in Ninth Annual International
Workshop on Micro Electro Mechanical Systems (MEMS ’96), San Diego, pp. 55–60.
Marco, S., Samitier, J., Ruiz, O., Morante, J.R., Esteve-Tinto, J., and Bausells, J. (1991) “Stress
Measurements of SiO -Polycrystalline Silicon Structures for Micromechanical Devices by Means of
2
Infrared Spectroscopy Technique,” in 6th International Conference on Solid-State Sensors and
Actuators (Transducers ’91), San Francisco, pp. 209–12.
Mardilovich, P., Routkevitch, D., and Govyadinov, A. (2000) “Hybrid Micromachining and Surface
Microstructuring of Alumina Ceramic,” in Hesketh, P.J., Hughes, H.G., Bailey, W.E., Misra, D., Ang,
S.S., and Davidson, J.L., eds., The Electrochemical Society, Inc. in Proceeding Volumes 2000–19.
Maseeh, F., and Senturia, S.D. (1989) “Elastic Properties of Thin Polyimide Films,” in Polyimides:
Materials, Chemistry, and Characterization, Feger, C., Khojasteh, M.M., and McGrath, J.E., eds.,
Elsevier Science Publishers B.V., Amsterdam, pp. 575–84.
Maseeh, F., and Senturia, S.D. (1990) “Plastic Deformation of Highly Doped Silicon,” Sensor. Actuator.
A A23, pp. 861–65.
Maseeh, F., and Senturia, S.D. (1990) “Viscoelasticity and Creep Recovery of Polyimide Thin Films,”
in Technical Digest: 1990 Solid State Sensor and Actuator Workshop, Hilton Head Island, SC,
pp. 55–60.
Maseeh-Tehrani, F. (1990) Characterization of Mechanical Properties of Microelectronic Thin Films,
Ph.D. thesis, Massachusetts Institute of Technology.
Mastrangelo, C.H., and Hsu, C.H. (1993a) “Mechanical Stability and Adhesion of Microstructures under
Capillary Forces: Part 1. Basic Theory,” J. Microelectromech. Syst. 2, pp. 33–43.
Mastrangelo, C.H., and Hsu, C.H. (1993b) “Mechanical Stability and Adhesion of Microstructures under
Capillary Forces: Part 2. Experiments,” J. Microelectromech. Syst. 2, pp. 44–55.
Mastrangelo, C.H., and Saloka, G.S. (1993) “A Dry-Release Method Based on Polymer Columns for
Microstructure Fabrication,” in Proceedings: IEEE Micro Electro Mechanical Systems (MEMS ’93),
Fort Lauderdale, pp. 77–81.
Matson, E.A., and Polysakov, S.A. (1977) “On the Evolutionary Selection Principle in Relation to the
Growth of Polycrystalline Silicon Films,” Phys. Sta. Sol. (a) 41, pp. K93–K95.
Matsumura, M., and Morrison, S.R. (1983) “Photoanodic Properties of an n-Type Silicon Electrode in
Aqueous Solution Containing Fluorides,” J. Electroanal. Chem. 144, pp. 113–20.
Mayer, G.K., Offereins, H.L., Sandmeier, H., and Kuhl, K. (1990) “Fabrication of Non-Underetched
Convex Corners in Ansisotropic Etching of (100)-Silicon in Aqueous KOH with Respect to Novel
Micromechanic Elements,” J. Electrochem. Soc. 137, pp. 3947–51.
McNeil, V.M., Wang, S.S., Ng, K.-Y., and Schmidt, M.A. (1990) “An Investigation of the Electrochemical
Etching of (100) Silicon in CsOH and KOH,” in Technical Digest: 1990 Solid State Sensor and
Actuator Workshop, Hilton Head Island, SC, pp. 92–97.

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